This module deals with methods which utilize heavy particles (protons and other ions) as primary bombarding particles. In SIMS sputtering yield is being analyzed, giving great information on surface composition.

This module deals with methods which utilize heavy particles (protons and other ions) as primary bombarding particles. In a family of RBS, ERD and partially NRA methods simple Newtonian laws of elastic collisions lead to a precise knowledge of surface composition. A tiny bit of nuclear physics is present in the NRA method though it shares basic principles with RBS and ERD.

These methods use an electron beam as primary. Knowing the all the atoms have their signature band structure on can use that knowledge to identify the elements with AES and EDS methods. They both need a primary electron beam and they both rely on creating vacancies in the core energy leveles and filling of these vacancies with higher level electrons. In AES Auger electron energies are measured as they are emitted from the specimen. In EDS characteristic X-ray photon energies are measured. Both give information on the sample composition though in a different way, yet having the same starting processes.

One could not mention electron microscopes when talking about electron diagnostics. TEM and SEM are discussed, and their basic principles exposed. Methods of obtaining better quality images are shown.