There is a vast variety of contemporary surface analysis methods that you can use for your research. If you are not sure which one is right for you, or if you want to obtain the right information about different surface analysis techniques, then this course is for you!
This course describes the most widely used analysis methods in contemporary surface science. It presents the strengths and weaknesses of each method so that you can choose the one that provides you with the information you need. It also reviews what each method cannot give to you, as well as how to interpret the results obtained from each method.
This course is filled with examples to help you become familiar with the graphs and figures obtained from common surface analysis methods.
Each method is described in a similar way: basic principle, apparatus scheme, example results, special features, and actual device examples.
Methods of Surface Analysis
Offered By
National Research Nuclear University MEPhI
Syllabus - What you will learn from this course
Week
1Introduction
Module 1 gets the students familiar with the main features of modern surface analysis methods and values, which they could provide. Question-answer concept. An interesting correlation between analytical spot size and composition accuracy is shown and explained.
1 video (Total 11 min), 1 reading, 1 quiz
1 reading
Introduction to Methods of Surface Analysis20m
1 practice exercise
Training test20m
Particle Diagnostics. Secondary Ion Mass Spectrometry (SIMS)
This module deals with methods which utilize heavy particles (protons and other ions) as primary bombarding particles. In SIMS sputtering yield is being analyzed, giving great information on surface composition.
4 videos (Total 29 min), 3 readings, 2 quizzes
4 videos
SIMS: Examples5m
SIMS: Results Interpretation. Part 18m
SIMS: Results Interpretation. Part 27m
3 readings
SIMS - Basic Principles and Components20m
SIMS - Examples20m
SIMS - Results Interpretaion20m
2 practice exercises
Training test16m
Qiuz Secondary Ion Mass Spectrometry (SIMS)12m
Week
2Particle Diagnostics. Rutherford Backscattering
This module deals with methods which utilize heavy particles (protons and other ions) as primary bombarding particles. In a family of RBS, ERD and partially NRA methods simple Newtonian laws of elastic collisions lead to a precise knowledge of surface composition. A tiny bit of nuclear physics is present in the NRA method though it shares basic principles with RBS and ERD.
6 videos (Total 52 min), 5 readings, 4 quizzes
6 videos
RBS: Results Interpretation. Part 16m
RBS: Results Interpretation. Part 25m
RBS: More Examples, Actual Apparatus10m
Elastic Recoil Detection11m
Nuclear Reaction Analysis9m
5 readings
Rutherford Back Scattering Spectroscopy20m
RBS - Results Interpretation20m
RBS - More Examples, Actual Apparatus20m
Elastic Recoil Detection20m
Nuclear Reaction Analysis20m
4 practice exercises
Quiz Rutherford Backscattering Spectrometry (RBS)14m
Quiz Elastic Recoil Detection Analysis (ERDA)10m
Training test20m
Quiz Elastic Recoil Detection Analysis (ERDA)12m
Week
3Electron Diagnostics. Spectroscopy
These methods use an electron beam as primary. Knowing the all the atoms have their signature band structure on can use that knowledge to identify the elements with AES and EDS methods. They both need a primary electron beam and they both rely on creating vacancies in the core energy leveles and filling of these vacancies with higher level electrons. In AES Auger electron energies are measured as they are emitted from the specimen. In EDS characteristic X-ray photon energies are measured. Both give information on the sample composition though in a different way, yet having the same starting processes.
6 videos (Total 51 min), 6 readings, 3 quizzes
6 videos
Auger Spectroscopy: Analysis and Interpretation of Results, Examples12m
Energy Dispersive Spectroscopy11m
EDS: Examples4m
EDS: Actual Device Components6m
EDS: Quantitative Analysis7m
6 readings
Auger Spectroscopy - Operating Principles, Facility Scheme20m
Auger Spectroscopy - Analysis and Interpretation of Results, Examples20m
Energy Dispersive Spectroscopy20m
EDS - Examples20m
EDS - Actual Device Components20m
EDS - Quantitative Analysis20m
3 practice exercises
Quiz Auger Spectroscopy14m
Training test20m
Quiz Energy Dispersive Spectroscopy20m
Week
4Electron Diagnostics. Microscopy
One could not mention electron microscopes when talking about electron diagnostics. TEM and SEM are discussed, and their basic principles exposed. Methods of obtaining better quality images are shown.
9 videos (Total 88 min), 9 readings, 3 quizzes
9 videos
TEM: Facility Scheme7m
TEM: Working Regimes, Examples, Aberrations10m
TEM: Sample Preparation8m
SEM: Basic Principles12m
SEM: Registered Signals9m
SEM: Basic Parameters11m
SEM: Depth of Field5m
SEM: Image Resolution and Beam Size13m
9 readings
Transmission Electron Microscopy20m
TEM - Facility Scheme20m
TEM - Working Regimes, Examples, Aberrations20m
TEM - Sample Preparation20m
SEM - Basic Principles20m
SEM - Registered Signals20m
SEM - Basic Parameters20m
SEM - Depth of Field20m
SEM - Image Resolution and Beam Size20m
3 practice exercises
Quiz Transmission Electron Microscopy (TEM)20m
Training test20m
Quiz Scanning Electron Microscopy (SEM)28m
Instructor
Sadovsky Yaroslav
AssistantDepartment of Plasma Physics
About National Research Nuclear University MEPhI
National Research Nuclear University “MEPhI” is one of the most recognized technical universities in Russia. It is the only research nuclear university in Russia. The aim of the university existence is preparing the specialists for nuclear industry, science, information technology and other high-tech sectors of Russian economy.
National Research Nuclear University “MEPhI” implements postgraduate professional education curricula (PhD and postdoctoral level), carries out fundamental and applied scientific research in high-priority fields of science and technologies.
Among MEPhI graduates are Nobel Prize winners, members of the Russian Academy of Sciences, and winners of national prizes. Its professors and alumni have made major contributions to various fields of theoretical and experimental physics, mathematics, cybernetics, and computer sciences.
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