Dry Etching: Basic Function

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4.8 (1,545 ratings)
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MS

Dec 02, 2019

This course was very helpful to understand the basic fabrication techniques for making micro and nanodevices. I can confidently use equipment in my laboratory after doing this course. Thank you

MJ

Apr 11, 2020

Its a really nice informative course. But Etching was really boring part and difficult to understand compared to other parts of the module. If that can be made more friendly it would be great.

From the lesson
Nanofabrication: Etching
In this module, you will learn to describe and compare wet and dry etching processes. These processes are used to selectively remove material in nanofabrication.

Taught By

  • Nan M. Jokerst

    Nan M. Jokerst

    J. A. Jones Professor of Electrical and Computer Engineering
  • Carrie Donley

    Carrie Donley

    Director of CHANL (Chapel Hill Analytical and Nanofabrication Laboratory)
  • James Cahoon

    James Cahoon

    Assistant Professor
  • Jacob Jones

    Jacob Jones

    Professor

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