Electron-beam Lithography: Sample Patterning Demonstration

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KA

Apr 07, 2019

It helped me a lot giving brief description of nanocharacterization and nanofabrication processes. It will definitely help me in further study and researches on nanotechnology.

AR

Mar 05, 2019

Topics covered and concepts were precise, to the point and well explained. Both practical and theoretical aspects were taught which is very rare to receive in an online course.

From the lesson
Nanofabrication: Patterning and Self-Assembly
In this module, we will investigate 5 different methods used in nanotechnology for patterning. You will be able to explain the basic processes of photolithography, e-beam lithography, ion beam lithography, hot embossing, and self-assembly.

Taught By

  • Nan M. Jokerst

    Nan M. Jokerst

    J. A. Jones Professor of Electrical and Computer Engineering
  • Carrie Donley

    Carrie Donley

    Director of CHANL (Chapel Hill Analytical and Nanofabrication Laboratory)
  • James Cahoon

    James Cahoon

    Assistant Professor
  • Jacob Jones

    Jacob Jones

    Professor

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