MEMS devices leverage the same equipment and processes used for semiconductor devices to create microscale sensors and actuators that drive innovation across a wide range of technologies in modern society. Through this course, learners will be able to demonstrate how these processes are specifically used for MEMS fabrication and highlight some differences from semiconductor fabrication. Key applications in consumer, industrial, aerospace, and medical applications are highlighted and described in more detail.
Introduction to Micro Electro Mechanical Systems (MEMS)
Introduction to Micro Electro Mechanical Systems (MEMS)
This course is part of Introduction to Semiconductor and MEMS Fabrication Specialization
Instructors: Rama Prasad
Access provided by National Research Nuclear University MEPhI
Gain insight into a topic and learn the fundamentals.
Intermediate level
Recommended experience
9 hours to complete
Flexible schedule
Learn at your own pace
Skills you'll gain
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Assessments
8 assignments
Taught in English
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August 2025
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This course is part of the Introduction to Semiconductor and MEMS Fabrication Specialization
When you enroll in this course, you'll also be enrolled in this Specialization.
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There are 3 modules in this course
In this module, we dive into some of the specifics involved in the creation of MEMS devices. We begin by briefly covering some of the physical phenomena used in MEMS devices and then discuss the differences between bulk and surface micromachining fabrication processes. Lastly, we provide more detail around requirements and techniques used in the packaging for MEMS.
What's included
3 videos2 readings3 assignments
This Module covers the field of Micro Electromechanical Systems from the MEMS device design and system specification point of view. The most widely deployed MEMS inertial sensors and MEMS pressure sensors device model, design and fabrication are introduced. Ongoing development of transducer architecture for various applications is presented.
What's included
2 videos4 readings2 assignments8 plugins
In this module, we discuss the application of MEMS fabrication techniques and MEMS devices to the field of medical applications. We highlight key design considerations and device testing that are specific for devices used in the medical field. Some commercial examples of MEMS medical devices are reviewed and two technologies with unique medical applications, microfluidics and microelectrodes, are discussed in more detail.
What's included
3 videos2 readings3 assignments
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