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Introduction to Micro Electro Mechanical Systems (MEMS)

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Introduction to Micro Electro Mechanical Systems (MEMS)

Ce cours fait partie de Spécialisation "Introduction to Semiconductor and MEMS Fabrication"

Instructeurs : Rama Prasad

Inclus avec

3 modules

Obtenez un aperçu d'un sujet et apprenez les principes fondamentaux.

niveau Intermédiaire

Expérience recommandée

9 heures à compléter

Planning flexible

Apprenez à votre propre rythme

3 modules

Obtenez un aperçu d'un sujet et apprenez les principes fondamentaux.

niveau Intermédiaire

Expérience recommandée

9 heures à compléter

Planning flexible

Apprenez à votre propre rythme

Compétences que vous acquerrez

Catégorie : Biomedical Engineering
Catégorie : Mathematical Modeling
Catégorie : Mechanical Design
Catégorie : Electronics
Catégorie : Semiconductors
Catégorie : Mechanical Engineering
Catégorie : Microarchitecture
Catégorie : Hardware Architecture
Catégorie : Manufacturing Processes
Catégorie : Medical Equipment and Technology
Catégorie : Materials science
Catégorie : Design Specifications
Catégorie : Medical Devices

Détails à connaître

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8 devoirs

Enseigné en Anglais

91%

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Ce cours fait partie de la Spécialisation "Introduction to Semiconductor and MEMS Fabrication"

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Il y a 3 modules dans ce cours

MEMS devices leverage the same equipment and processes used for semiconductor devices to create microscale sensors and actuators that drive innovation across a wide range of technologies in modern society. Through this course, learners will be able to demonstrate how these processes are specifically used for MEMS fabrication and highlight some differences from semiconductor fabrication. Key applications in consumer, industrial, aerospace, and medical applications are highlighted and described in more detail.

Détails du module

In this module, we dive into some of the specifics involved in the creation of MEMS devices. We begin by briefly covering some of the physical phenomena used in MEMS devices and then discuss the differences between bulk and surface micromachining fabrication processes. Lastly, we provide more detail around requirements and techniques used in the packaging for MEMS.

Inclus

3 vidéos2 lectures3 devoirs

3 vidéosTotal 58 minutes

Fabrication Processes Specific to MEMS - Video 118 minutes
Fabrication Processes Specific to MEMS - Video 232 minutes
Fabrication Processes Specific to MEMS - Video 38 minutes

2 lecturesTotal 60 minutes

Fabrication Processes Specific to MEMS - Module Overview30 minutes
Fabrication Processes Specific to MEMS - Additional Resources30 minutes

3 devoirsTotal 45 minutes

Fabrication Processes Specific to MEMS - Quiz 115 minutes
Fabrication Processes Specific to MEMS - Quiz 215 minutes
Fabrication Processes Specific to MEMS - Quiz 315 minutes

This Module covers the field of Micro Electromechanical Systems from the MEMS device design and system specification point of view. The most widely deployed MEMS inertial sensors and MEMS pressure sensors device model, design and fabrication are introduced. Ongoing development of transducer architecture for various applications is presented.

Inclus

2 vidéos4 lectures2 devoirs8 plugins

2 vidéosTotal 86 minutes

MEMS in Consumer, Aerospace, Industrial - Lecture 142 minutes
MEMS in Consumer, Aerospace, Industrial - Lecture 2 45 minutes

4 lecturesTotal 64 minutes

MEMS in consumer, aerospace, industrial - Module Overview30 minutes
MEMS in Consumer, Aerospace, Industrial - Lecture 12 minutes
MEMS in Consumer, Aerospace, Industrial - Lecture 22 minutes
MEMS in Consumer, Aerospace, Industrial - Additional Resources30 minutes

2 devoirsTotal 40 minutes

MEMS in Consumer, Aerospace, Industrial - Quiz 120 minutes
MEMS in Consumer, Aerospace, Industrial - Quiz 220 minutes

8 pluginsTotal 37 minutes

MEMS in Consumer, Aerospace, Industrial - product 12 minutes
MEMS in Consumer, Aerospace, Industrial - product 25 minutes
MEMS in Consumer, Aerospace, Industrial - product 35 minutes
MEMS in Consumer, Aerospace, Industrial - product 45 minutes
MEMS in Consumer, Aerospace, Industrial - product 55 minutes
MEMS in Consumer, Aerospace, Industrial - product 65 minutes
MEMS in Consumer, Aerospace, Industrial - product 75 minutes
MEMS in Consumer, Aerospace, Industrial - product 85 minutes

In this module, we discuss the application of MEMS fabrication techniques and MEMS devices to the field of medical applications. We highlight key design considerations and device testing that are specific for devices used in the medical field. Some commercial examples of MEMS medical devices are reviewed and two technologies with unique medical applications, microfluidics and microelectrodes, are discussed in more detail.

Inclus

3 vidéos2 lectures3 devoirs

3 vidéosTotal 50 minutes

MEMS for Medical Applications - Video 119 minutes
MEMS for Medical Applications - Video 29 minutes
MEMS for Medical Applications - Video 322 minutes

2 lecturesTotal 60 minutes

MEMS for Medical Applications - Module Overview30 minutes
MEMS for Medical Applications - Additional Resources30 minutes

3 devoirsTotal 45 minutes

MEMS for Medical Applications - Quiz 115 minutes
MEMS for Medical Applications - Quiz 215 minutes
MEMS for Medical Applications - Quiz 315 minutes

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