École Polytechnique Fédérale de Lausanne

Micro and Nanofabrication (MEMS)

École Polytechnique Fédérale de Lausanne

Micro and Nanofabrication (MEMS)

Juergen Brugger

Instructor: Juergen Brugger

Ask Coursera

Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

6 weeks to complete
at 10 hours a week
Flexible schedule
Learn at your own pace
Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

6 weeks to complete
at 10 hours a week
Flexible schedule
Learn at your own pace

What you'll learn

  • How to select the correct fabrication process for a specific micro-device or microsystem

  • Establish the workflow for the cleanroom processes

  • Identify how physical and chemical phenomena govern miniaturized systems for various applications

  • Resource planning for a given microsystem fabrication

Details to know

Shareable certificate

Add to your LinkedIn profile

Recently updated!

July 2026

Assessments

70 assignments

Taught in English

See how employees at top companies are mastering in-demand skills

 logos of Petrobras, TATA, Danone, Capgemini, P&G and L'Oreal

There are 8 modules in this course

What's included

7 videos10 readings8 assignments2 plugins

What's included

7 videos2 readings8 assignments1 plugin

What's included

14 videos4 readings13 assignments1 plugin

What's included

16 videos3 readings17 assignments1 plugin

What's included

7 videos2 readings8 assignments1 plugin

What's included

6 videos2 readings7 assignments1 plugin

What's included

7 videos7 readings9 assignments1 plugin

What's included

1 reading1 plugin

Instructor

Juergen Brugger
École Polytechnique Fédérale de Lausanne
1 Course1 learner

Why people choose Coursera for their career

Felipe M.

Learner since 2018
"To be able to take courses at my own pace and rhythm has been an amazing experience. I can learn whenever it fits my schedule and mood."

Jennifer J.

Learner since 2020
"I directly applied the concepts and skills I learned from my courses to an exciting new project at work."

Larry W.

Learner since 2021
"When I need courses on topics that my university doesn't offer, Coursera is one of the best places to go."

Chaitanya A.

"Learning isn't just about being better at your job: it's so much more than that. Coursera allows me to learn without limits."

Frequently asked questions