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In diesem Kurs gibt es 6 Module
Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.
Optical and X-ray techniques are powerful ways to characterize semiconductor thin films. They can be used to measure film thickness, purity and crystalline quality, and for compositional analysis. Modern techniques are fast, turn-key, and generally non-destructive, allowing for rapid assessment of material properties. This course describes the fundamentals of optical and X-ray characterization and provides real-world examples of how they are used in semiconductor manufacturing.
Das ist alles enthalten
1 Video2 Lektüren
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1 Video•Insgesamt 1 Minute
Introduction to This Course•1 Minute
2 Lektüren•Insgesamt 8 Minuten
Instructor Bio•3 Minuten
Course Tips and Video Information•5 Minuten
Week 5.1: Reflectance Spectroscopy
Modul 2•1 Stunde abzuschließen
Moduldetails
This week introduces the concept of reflectance spectroscopy: a rapid, convenient, and non-destructive technique for measuring the thickness of transparent materials.
This week, you will learn about ellipsometry, a powerful technique that allows us to extract the thickness and refractive index of transparent layers as thin as a few nanometers.
This week, you will learn about photoluminescence.
Das ist alles enthalten
1 Video1 Lektüre1 Aufgabe
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1 Video•Insgesamt 11 Minuten
5.3: Photoluminescence•11 Minuten
1 Lektüre•Insgesamt 20 Minuten
Suggested Reading: Fundamentals of Spectroscopy (optional)•20 Minuten
1 Aufgabe•Insgesamt 10 Minuten
Check Your Knowledge (CYK)•10 Minuten
Week 5.4: Electron Microprobe X-Ray Analysis
Modul 5•1 Stunde abzuschließen
Moduldetails
This week, you will learn about electron microprobe X-ray analysis.
Das ist alles enthalten
2 Videos1 Aufgabe
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2 Videos•Insgesamt 23 Minuten
5.4.1: Electron Microprobe X-ray Analysis•17 Minuten
5.4.2: Examples of Electron Microprobe Analysis•6 Minuten
1 Aufgabe•Insgesamt 10 Minuten
Check Your Knowledge (CYK)•10 Minuten
Week 5.5: Course Wrap-up and Project
Modul 6•1 Stunde abzuschließen
Moduldetails
This week, you will complete a case study to assess your ability to analyze electron microprobe x-ray images to determine the constituent elements in a 40 nm MOSFET.
Das ist alles enthalten
1 Video1 Lektüre1 Aufgabe
Infos zu Modulinhalt anzeigen
1 Video•Insgesamt 14 Minuten
Case Study Solution: Electron Microprobe Project•14 Minuten
1 Lektüre•Insgesamt 60 Minuten
Electron Microprobe Analysis of 45 nm MOSFETs•60 Minuten
1 Aufgabe•Insgesamt 3 Minuten
Project Self-reflection•3 Minuten
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