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There are 3 modules in this course
Thin-film deposition, lithography, and etching form the most fundamental processes used in microfabrication to create devices. This course introduces these processes, providing learners with an understanding of the techniques, physical phenomena, and material properties that inform fabrication decisions.
This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course.
Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.
In this module we cover thin film deposition using both physical and chemical methods. We briefly discuss some of the important features of thin films that determine the materials and deposition processes selected. A general introduction is provided for some of the most commonly used physical and chemical deposition methods.
In this module we discuss lithography techniques and technologies, which are one of the foundational process steps to all microfabrication technologies.
This module presents an introduction to the fundamental micromachining technology of etching. This is a subtractive process where material is removed to create or transfer pattern to thin film layers.
What's included
3 videos5 readings3 assignments
Show info about module content
3 videos•Total 120 minutes
Etching Techniques - Lecture 1•39 minutes
Etching Techniques - Lecture 2•23 minutes
New Video Etching Techniques - Lecture 3•59 minutes
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Is financial aid available?
Yes. In select learning programs, you can apply for financial aid or a scholarship if you can’t afford the enrollment fee. If fin aid or scholarship is available for your learning program selection, you’ll find a link to apply on the description page.