Introduction to Micro Electro Mechanical Systems (MEMS)

Introduction to Micro Electro Mechanical Systems (MEMS)

This course is part of Introduction to Semiconductor and MEMS Fabrication Specialization

Instructors: Rama Prasad

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3 modules

Gain insight into a topic and learn the fundamentals.

Intermediate level

Recommended experience

9 hours to complete

Flexible schedule

Learn at your own pace

3 modules

Gain insight into a topic and learn the fundamentals.

Intermediate level

Recommended experience

9 hours to complete

Flexible schedule

Learn at your own pace

Skills you'll gain

Details to know

Shareable certificate

Add to your LinkedIn profile

Assessments

8 assignments

Taught in English

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This course is part of the Introduction to Semiconductor and MEMS Fabrication Specialization

When you enroll in this course, you'll also be enrolled in this Specialization.

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Gain a foundational understanding of a subject or tool
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There are 3 modules in this course

MEMS devices leverage the same equipment and processes used for semiconductor devices to create microscale sensors and actuators that drive innovation across a wide range of technologies in modern society. Through this course, learners will be able to demonstrate how these processes are specifically used for MEMS fabrication and highlight some differences from semiconductor fabrication. Key applications in consumer, industrial, aerospace, and medical applications are highlighted and described in more detail.

In this module, we dive into some of the specifics involved in the creation of MEMS devices. We begin by briefly covering some of the physical phenomena used in MEMS devices and then discuss the differences between bulk and surface micromachining fabrication processes. Lastly, we provide more detail around requirements and techniques used in the packaging for MEMS.

What's included

3 videos2 readings3 assignments

3 videos Total 58 minutes

Fabrication Processes Specific to MEMS - Video 1 18 minutes
Fabrication Processes Specific to MEMS - Video 2 32 minutes
Fabrication Processes Specific to MEMS - Video 3 8 minutes

2 readings Total 60 minutes

Fabrication Processes Specific to MEMS - Module Overview 30 minutes
Fabrication Processes Specific to MEMS - Additional Resources 30 minutes

3 assignments Total 45 minutes

Fabrication Processes Specific to MEMS - Quiz 1 15 minutes
Fabrication Processes Specific to MEMS - Quiz 2 15 minutes
Fabrication Processes Specific to MEMS - Quiz 3 15 minutes

This Module covers the field of Micro Electromechanical Systems from the MEMS device design and system specification point of view. The most widely deployed MEMS inertial sensors and MEMS pressure sensors device model, design and fabrication are introduced. Ongoing development of transducer architecture for various applications is presented.

What's included

2 videos4 readings2 assignments8 plugins

2 videos Total 86 minutes

MEMS in Consumer, Aerospace, Industrial - Lecture 1 42 minutes
MEMS in Consumer, Aerospace, Industrial - Lecture 2 45 minutes

4 readings Total 64 minutes

MEMS in consumer, aerospace, industrial - Module Overview 30 minutes
MEMS in Consumer, Aerospace, Industrial - Lecture 1 2 minutes
MEMS in Consumer, Aerospace, Industrial - Lecture 2 2 minutes
MEMS in Consumer, Aerospace, Industrial - Additional Resources 30 minutes

2 assignments Total 40 minutes

MEMS in Consumer, Aerospace, Industrial - Quiz 1 20 minutes
MEMS in Consumer, Aerospace, Industrial - Quiz 2 20 minutes

8 plugins Total 37 minutes

MEMS in Consumer, Aerospace, Industrial - product 1 2 minutes
MEMS in Consumer, Aerospace, Industrial - product 2 5 minutes
MEMS in Consumer, Aerospace, Industrial - product 3 5 minutes
MEMS in Consumer, Aerospace, Industrial - product 4 5 minutes
MEMS in Consumer, Aerospace, Industrial - product 5 5 minutes
MEMS in Consumer, Aerospace, Industrial - product 6 5 minutes
MEMS in Consumer, Aerospace, Industrial - product 7 5 minutes
MEMS in Consumer, Aerospace, Industrial - product 8 5 minutes

In this module, we discuss the application of MEMS fabrication techniques and MEMS devices to the field of medical applications. We highlight key design considerations and device testing that are specific for devices used in the medical field. Some commercial examples of MEMS medical devices are reviewed and two technologies with unique medical applications, microfluidics and microelectrodes, are discussed in more detail.